Atom deposition

I would like to deposit 3 types of atoms (Al, Ga, N) on an AlN substrate. I used the fix deposit command but I cannot deposit the 3 types together (it deposits one of the 3)
Attached the input file.
in.sputter1 (2.0 KB)
Any help?
Best regards

You can use multiple fix deposit instances or deposit multiple atoms at a time from a molecule file.

I used multiple fix deposits but it only deposits the atoms in the last command fix.

Then you did not use them correctly.

but how do we use it?

See the documentation.