Help for Sputtering with Lammps

Please include the mailing list, thanks. This benefits you as well since some one else may also chime in with valuable suggestions and insights.

My suggestion is to start with the Literature and search what kind of empirical potentials have been used for Ar sputtering on Si or D on W(?). If you are able to find this kind of pubs, chances are great that you will find parameters in the same paper.