sputtering process

Dear Axel,
how to design sputtering process in lammps (physical vapour deposition) for deposition of thin films.

Thanks and Regards,
Digvijay

Dear Axel,
how to design sputtering process in lammps (physical vapour
deposition) for deposition of thin films.

Did you look at articles using MD to perform such a study?
Then, you should find in the documentation all the information on how to
reproduce a published method.

Commands like velocity, create_atoms, fix dt/reset could be important
for such simulations.

Julien.

Dear Digvijay,

Using fix deposit you can simulate sputtering. The documentation is available:

http://lammps.sandia.gov/doc/fix_deposit.html

LAMMPS also provides a very helpful example to get started with implementing this fix.

Regards,
Tara