want to know lammps command for sputter deposition of metals on Si substrate

Dear all,

  Please suggest me Lammps Commands for given statement in an article for
sputter deposition of metals on Si substrate-

"The velocities of the deposited atoms are sampled from a
Maxwell-Gaussian distribution with a most probable energy of 1ev,and with
randomly selected incident angles.
             This high energy of the deposited metal atoms can be
dissipated with the Berendsen thermostat to keep the whole
temperature around 300K corresponding to the stated value."

with best

Basant Kr. Singh

See the fix deposit and fix temp/berendsen commands.