units metal boundary p p f atom_style atomic read_data dd mass 1 26.9 mass 2 14.01 mass 3 69.72 pair_style sw pair_coeff * * GaNAl.sw Ga N Al region r_fix block INF INF INF INF INF 3.11135 units box region r_middle block INF INF INF INF 4 24 units box group g_middle dynamic all region r_middle region r_surface block INF INF INF INF 24 29 units box group g_surface dynamic all region r_surface region r_adatom block 0.0 46.65 0.0 80.8 29 109 side in group g_adatom dynamic all region r_adatom region r_deposition block INF INF INF INF 29 EDGE units box group g_deposition dynamic all region r_deposition compute temp3 g_middle temp compute_modify temp3 dynamic/dof yes compute temp4 g_adatom temp compute_modify temp4 dynamic/dof yes compute temp5 g_surface temp compute_modify temp5 dynamic/dof yes group g_depo type 1 2 3 group g_fix region r_fix #group film subtract g_depo g_deposition g_middle #compute AlN_temp g_middle temp #compute_modify AlN_temp dynamic yes #variable dz2 equal "90+step*0.000004" #velocity all create 1000.0 4928459 rot yes dist gaussian fix 13 g_deposition nve fix 10 g_surface nve #fix 11 g_adatom nve #fix 2 g_fix setforce 0.0 0.0 0.0 fix 2 g_fix langevin 1000 1000 0.1 699483 fix 3 g_middle nvt temp 1000 1000 0.1 fix_modify 3 temp temp3 #fix 12 g_adatom temp/rescale 1000 1000 1000 1.0 1.0 #fix 13 g_middle temp/rescale 1000 1000 1000 1.0 1.0 fix 6 g_depo deposit 2000 2 100 67546 region r_adatom vz -15.29 -15.29 units box fix 7 g_depo deposit 1000 1 200 69546 region r_adatom vz -11.03 -11.03 units box fix 8 g_depo deposit 1000 3 200 70546 region r_adatom vz -6.9 -6.9 units box #variable dz2 equal "80+step*0.000004" fix muro all wall/reflect zhi EDGE variable v4 equal count(g_adatom) #thermo 1000 #thermo_style custom step temp etotal v_v4 c_temp3 #thermo_modify temp AlN_temp lost ignore norm yes thermo_style custom step atoms temp epair etotal press c_temp3 c_temp4 c_temp5 thermo 1000 thermo_modify temp temp3 #dump depoGaN all atom 2000 dump.depoGaN thermo_modify lost ignore flush yes dump depoGaN all atom 2000 dump.depoGaN restart 200000 file.restart run 400000 min_style cg minimize 1.0e-15 1.0e-15 1000 10000 dump depoGaN1 all atom 2000 dump.depoGaN1 run 250000