units metal boundary p p f atom_style atomic read_data dd mass 1 26.9 mass 2 14.01 mass 3 69.72 pair_style sw pair_coeff * * GaNAl.sw Ga N Al region r_fix block INF INF INF INF INF 3.11135 units box region r_middle block INF INF INF INF 4 24 units box group g_middle dynamic all region r_middle region r_surface block INF INF INF INF 24 29 units box group g_surface dynamic all region r_surface region r_adatom block 0.0 46.65 0.0 80.8 29 EDGE group g_adatom dynamic all region r_adatom #region r_deposition block INF INF INF INF 24 109 units box #group g_deposition region r_deposition group g_depo type 1 2 3 group g_fix region r_fix #group film subtract g_depo g_deposition g_middle compute AlN_temp g_middle temp #compute_modify AlN_temp dynamic yes variable dz2 equal "90+step*0.000004" fix muro all wall/reflect zhi v_dz2 velocity all create 1000.0 4928459 rot yes dist gaussian #fix 10 g_deposition nve fix 10 g_surface nve fix 11 g_adatom nve fix 3 g_middle nvt temp 1000 1000 0.1 fix 2 g_fix setforce 0.0 0.0 0.0 fix 12 g_middle temp/rescale 100 1000 1000 1.0 1.0 fix 6 g_depo deposit 8000 2 2500 67546 region r_adatom vz -15.29 -15.29 units box fix 7 g_depo deposit 3000 1 6667 69546 region r_adatom vz -11.22 -11.22 units box fix 8 g_depo deposit 5000 3 4000 70546 region r_adatom vz -6.9 -6.9 units box variable v4 equal count(g_adatom) thermo 1000 thermo_style custom step temp etotal v_v4 #thermo_modify temp AlN_temp lost ignore norm yes #dump depoGaN all atom 2000 dump.depoGaN thermo_modify lost ignore flush yes dump depoGaN all atom 2000 dump.depoGaN restart 200000 file.restart run 20000000 unfix 6 unfix 7 unfix 8 unfix 3 min_style cg minimize 1.0e-15 1.0e-15 1000 10000 dump depoGaN1 all atom 2000 dump.depoGaN1 run 5000000