# SiH4/NH3 deposition on Si simulation # Initialize clear units metal dimension 3 boundary p p f atom_style atomic # Create atoms read_data data.GAAS_progresivo # SW Potential pair_style sw pair_coeff * * parametros.sw Ga As # Define Settings region r_bottom block INF INF INF INF INF 3.0 units box group g_bottom region r_bottom region r_middle block INF INF INF INF 3.0 49.0 units box group g_middle region r_middle region r_top block INF INF INF INF 65.0 INF units box group g_top region r_top region r_deposition block INF INF INF INF 50.9 64.9 units box group g_deposition region r_deposition region r_gas block INF INF INF INF 65.0 INF units box group g_gas region r_gas #parametros velocity g_gas create 1000 492459 rot yes dist gaussian fix nve_deposition g_deposition nve fix fix_bottom g_bottom setforce 0.0 0.0 0.0 fix nvt_middle g_middle nvt temp 600 800 0.1 fix nvt_gas g_gas nvt temp 1000 1200 0.1 fix muro all wall/reflect zhi EDGE thermo 5000 #thermo_style custom step temp pe etotal thermo_modify lost ignore # Diffusion run dump salidadump all atom 20000 dump.salidaprogresiva #si el paso es mas grade da NaN (0.05 fallaba). timestep 0.001 #restart 100000 deposicion.restart run 1000000 undump salidadump dump dumpfinal all atom 100000 dump.finalprogresiva minimize 1.0e-4 1.0e-6 1000 10000