units metal boundary p p f atom_style atomic read_data dd mass 1 26.9 mass 2 14.01 mass 3 69.72 pair_style sw pair_coeff * * GaNAl.sw Ga N Al region r_fix block INF INF INF INF INF 3.11135 units box region r_middle block INF INF INF INF 4.97 $(26+step*0.0000048*0.85) units box region r_surface block INF INF INF INF 27 29 units box region r_adatom block 0.0 45.5 0.0 79.92 $(29+step*0.0000048*0.85) $(29+step*0.0000048*0.85) group g_adatom region r_adatom region r_deposition block 0.0 45.5 0.0 79.92 $(27+step*0.0000048*0.85) 126 group g_deposition region r_deposition group g_depo type 1 2 3 group g_surface region r_surface group g_middle region r_middle group g_fix region r_fix fix 10 g_deposition nve fix muro all wall/reflect zhi 50 fix 2 g_fix setforce 0.0 0.0 0.0 fix 3 g_middle nvt temp 1000 1000 0.1 fix 6 g_depo deposit 8000 2 2500 67546 region r_adatom vz -15.29 -15.29 units box fix 7 g_depo deposit 2000 1 1250 69546 region r_adatom vz -11.22 -11.22 units box fix 8 g_depo deposit 5000 3 500 70546 region r_adatom vz -6.9 -6.9 units box timestep 0.001 thermo 1000 #thermo_modify temp AlN_temp lost ignore norm yes thermo_modify lost ignore flush yes dump depoGaN all atom 2000 dump.depoGaN restart 100000 file.restart run 20000000 unfix 6 unfix 7 unfix 8 minimize 1.0e-15 1.0e-15 1000 10000 run 5000