#Use Tersoff potential
pair_style tersoff
pair_coeff * * SiO.tersoff Si O Si
In the above command in LAMMPS, it says 3rd element in LAMMPS is mapping to Si in the tersoff file but the tersoff file contains Si Si O , Si O, Si as attached snapshot.
But the third element refers to which Si in the tersoff file as shown in snapshot because file contains many Si Si O, Si O Si upto 8 permutations of Si, SI and O.