want to know lammps command for sputter deposition of metals on Si substrate

Please post to the list, not to me.

An input script is like a program. You have
to debug it one step at a time. Start with
something simple and build up. If LAMMPS
gives you an error about a command, read the
doc page for that command.

You don’t need to redefine the fix deposit
command several times.

Steve